A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process
نویسندگان
چکیده
منابع مشابه
A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process
This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shallow trench isolation) oxide in the process was used to limit the current direction and reduce lea...
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ژورنال
عنوان ژورنال: Applied Sciences
سال: 2017
ISSN: 2076-3417
DOI: 10.3390/app7121289